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Fabrication of planar, layered nanoparticles using tri-layer resist templates.

TitleFabrication of planar, layered nanoparticles using tri-layer resist templates.
Publication TypeJournal Article
Year of Publication2011
AuthorsHu W, Zhang M, Wilson RJ, Koh ALeen, Wi J-S, Tang M, Sinclair R, Wang SX
JournalNanotechnology
Volume22
Issue18
Pagination185302
Date Published2011 May 6
ISSN1361-6528
KeywordsCatalysis, Magnetics, Nanoparticles, Nanotechnology, Surface Properties
Abstract

A simple and universal pathway to produce free multilayer synthetic nanoparticles is developed based on lithography, vapor phase deposition and a tri-layer resist lift-off and release process. The fabrication method presented in this work is ideal for production of a broad range of nanoparticles, either free in solution or still attached to an intact release layer, with unique magnetic, optical, radioactive, electronic and catalytic properties. Multi-modal capabilities are implicit in the layered architecture. As an example, directly fabricated magnetic nanoparticles are evaluated to illustrate the structural integrity of thin internal multilayers and the nanoparticle stability in aggressive biological environments, which is highly desired for biomedical applications.

DOI10.1088/0957-4484/22/18/185302
Alternate JournalNanotechnology
PubMed ID21415483
PubMed Central IDPMC3143003
Grant List1U54CA119367 / CA / NCI NIH HHS / United States
1U54CA143907 / CA / NCI NIH HHS / United States
5R33CA138330 / CA / NCI NIH HHS / United States
R33 CA138330 / CA / NCI NIH HHS / United States
R33 CA138330-01A1 / CA / NCI NIH HHS / United States
R33 CA138330-02 / CA / NCI NIH HHS / United States
U54 CA119367 / CA / NCI NIH HHS / United States
U54 CA119367-05 / CA / NCI NIH HHS / United States
U54 CA143907-02 / CA / NCI NIH HHS / United States
U54 CA151459 / CA / NCI NIH HHS / United States
U54 CA151459-01 / CA / NCI NIH HHS / United States