Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range
Submitted by Nuvia A. Pacheco on Mon, 11/04/2019 - 09:37
| Title | Piezoelectric–Piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range |
| Publication Type | Journal Article |
| Year of Publication | 2020 |
| Authors | Xue F., Hu J., Guo Y., Han G., Ouyang Y., Wang S.X, He J. |
| Journal | IEEE Transactions on Industrial Electronics |
| Volume | 67 |
| Pagination | 551-559 |
| Date Published | Jan |
| Keywords | Bandwidth, Broad bandwidth and large dynamic range, coupled piezoelectric crystal effect, Crystals, electric field measurement, electric sensing devices, electric-field measurement, electric-field measurements, electric-field microelectromechanical system sensors, electric-field sensing, electric-field transducers, electrical appliances, fast transient overvoltage monitoring, hour-glass-shaped cavity, lightning damage, Mathematical model, microelectro-mechanical systems (MEMS) sensor, Micromechanical devices, microsensors, piezoelectric (PE) effect, piezoelectric transducers, piezoelectric-piezoresistive coupling MEMS sensors, piezoresistance, piezoresistive (PR) effect, Piezoresistive devices, piezoresistive effect, piezoresistive membrane, power grid, power grids, power system measurement, secure grid, Sensors, Strain, voltage measurement |
| DOI | 10.1109/TIE.2019.2893837 |
